TY  - DATA
AU  - Zhuoqing Yang
TI  - Advanced MEMS/NEMS Fabrication and Sensors
SN  - 9783030797492
PB  - springer
KW  - Engineering
KW  - Microsystems and MEMS
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-030-79749-2
ER  -