TY - DATA AU - Badih El-Kareh AU - Lou N. Hutter TI - Silicon Components and Processes Self Study T2 - Lecture Notes in Mechanical Engineering SN - 9783031592195 PB - Springer KW - Electronic Circuits and Systems KW - Engineering UR - https://link.springer.com/openurl?genre=book&isbn=978-3-031-59219-5 ER -