TY  - BOOK
AU  - Sze, S M
TI  - Semiconductor devices : physics and technology
SN  - 471874248
CY  - New York
KW  - Bipolar transistor
KW  - CMOS
KW  - Electronics and Communication engineering
KW  - Etching
KW  - Integrated devices
KW  - Lithography
KW  - Microwave diodes
KW  - MOSFET
KW  - Photonic devices
KW  - Semiconductor devices
N1  - Includes bibliographical references and index
ER  -