Campbell, Stephen A <br/><br/>
The science and engineering of microelectronic fabrication 

 - New York  Oxford University Press  1996 
 - xv, 536p.   
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>195105087 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics--Semiconductors--Design and Construction