TY  - DATA
AU  - Jaydeep Sarkar
TI  - Sputtering Materials for VLSI and Thin Film Devices
SN  - 9780815515937
PB  - William Andrew
KW  -  Manufacturing
KW  - Flat panel displays--Materials.,Microelectronics--Materials.,Sputtering (Physics)
KW  - TECHNOLOGY & ENGINEERING
UR  - https://search.ebscohost.com/login.aspx?direct=true&db=e000xww&site=ehost-live&scope=site&AN=662853
ER  -