W. Jantsch-Friedrich Schaffler
Gettering and Defect Engineering in Semiconductor Technology XIV
- Trans Tech Publications Ltd 2011
- Solid State Phenomena .
9783037852323
General
Materials Science
Electrical engineering--Materials--Congresses.,Getters--Congresses.,Semiconductors--Congresses.,Silicon crystals--Defects--Congresses.
TECHNOLOGY & ENGINEERING