Seiichi Miyazaki-Hitoshi Tabata <br/><br/>
Technology Evolution for Silicon Nano-Electronics 

 -  Trans Tech Publications Ltd  2011 
 - Key Engineering Materials .
<br/><br/><label>ISBN: </label>9783037850510 
<br/><br/><label>Subjects--Topical Terms: </label><br/> General<br/> Materials Science <br/>Metal oxide semiconductors--Congresses.,Nanoelectronics--Congresses.,Nanostructured materials--Congresses.<br/>TECHNOLOGY & ENGINEERING