TY  - DATA
AU  - Seiichi Miyazaki-Hitoshi Tabata
TI  - Technology Evolution for Silicon Nano-Electronics
T2  - Key Engineering Materials
SN  - 9783037850510
PB  - Trans Tech Publications Ltd
KW  -  General
KW  -  Materials Science
KW  - Metal oxide semiconductors--Congresses.,Nanoelectronics--Congresses.,Nanostructured materials--Congresses
KW  - TECHNOLOGY & ENGINEERING
UR  - https://search.ebscohost.com/login.aspx?direct=true&db=e000xww&site=ehost-live&scope=site&AN=553066
ER  -