TY  - DATA
AU  - Martin Kittler-H. Richter
TI  - Gettering and Defect Engineering in Semiconductor Technology XIII
T2  - Solid State Phenomena
SN  - 9783908451747
PB  - Trans Tech Publications Ltd
KW  -  General
KW  -  Materials Science
KW  - Semiconductors--Congresses.,Solid state electronics--Congresses
KW  - TECHNOLOGY & ENGINEERING
UR  - https://search.ebscohost.com/login.aspx?direct=true&db=e000xww&site=ehost-live&scope=site&AN=503559
ER  -