Handbook of Silicon Based MEMS Materials and Technologies - Markku Tilli-Mervi Paulasto-Krockel-Teruaki Motooka-Veikko Lindroos-Veli-Matti Airaksinen-Sami Franssila-Ari Lehto (William Andrew, 2010)
Keywords: Electronics; Microelectronics; Microelectromechanical systems.,Microelectromechanical systems--Materials.,Silicon--Electric properties; TECHNOLOGY & ENGINEERING