Peter M. Martin <br/><br/>
Handbook of Deposition Technologies for Films and Coatings  Science, Applications and Technology 

 - 3rd ed 
 -  William Andrew  2010 
<br/><br/><label>ISBN: </label>9780815520313 
<br/><br/><label>Subjects--Topical Terms: </label><br/> Electronics <br/> Microelectronics<br/>Coating processes.<br/>TECHNOLOGY & ENGINEERING