Smith, Donald L <br/><br/>
Thin-film deposition : principles and practice 

 - New York  McGraw-Hill  1995 
 - xxiii, 616p: ill.  
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0-07-113913-3 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Epitaxy<br/>Gas kinetics<br/>Physics<br/>Thin film -- Deposition<br/>Thin film -- Evaporation and deposition<br/>Thin film devices<br/>Vacuum technology<br/>Vapor-plating