TY  - BOOK
AU  - Smith, Donald L
TI  - Thin-film deposition : principles and practice
SN  - 0-07-113913-3
CY  - New York
KW  - Epitaxy
KW  - Gas kinetics
KW  - Physics
KW  - Thin film -- Deposition
KW  - Thin film -- Evaporation and deposition
KW  - Thin film devices
KW  - Vacuum technology
KW  - Vapor-plating
N1  - Includes bibliographical references and index
ER  -