TY  - BOOK
AU  - Trimmer, William, S. ed.
TI  - Micromechanics and MEMS
SN  - 780310863
CY  - New York
KW  - Electrostatic and Magnetic actuators
KW  - Harmonic motors
KW  - Mechanics -- Micromechanics
KW  - Microelectromechanical systems (MEMS)
KW  - Side comb
N1  - Includes index
ER  -