Elwenspoek, M <br/><br/>
Mechanical microsensors 

 - New York  Springer Verlag  2001 
 - x, 2695p.  
 - Microtechnology and MEMS .
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>3540675825 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Detectors -- Design and construction<br/>Microelectromechanical systems -- Design and construction<br/>Micromachining<br/>Silicon<br/>Transducers