TY  - BOOK
AU  - Elwenspoek, M
AU  - Wiegerink, R
TI  - Mechanical microsensors
T2  - Microtechnology and MEMS
SN  - 3540675825
CY  - New York
KW  - Detectors -- Design and construction
KW  - Microelectromechanical systems -- Design and construction
KW  - Micromachining
KW  - Silicon
KW  - Transducers
N1  - Includes bibliographical references and index
ER  -