Gad-el-Hak, Mohamed, Ed. <br/><br/>
The MEMS handbook 

 - Boca Raton  CRC Press  2002 
 - ill.  
 - The Mechanical engineering handbook series .
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>849300770 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Mechanical engineering -- Handbook<br/>Microelectromechanical systems