Jaeger, Richard C <br/><br/>
Introduction to microelectronic fabrication - Vol. 5 

 - 2 
 - New Jersey  Prentice-Hall  2002 
 - xiv, 316p.  
 - Modular series on solid state devices .
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>201444941 
<br/><br/><label>Subjects--Topical Terms: </label><br/>MEMS -- Microelectronic mechanical systems<br/>Microelectronics -- MOS and CMOS (Metal oxide semiconductor, Complimentary) -- Fabrication