TY  - BOOK
AU  - Jaeger, Richard C
TI  - Introduction to microelectronic fabrication - Vol. 5
T2  - Modular series on solid state devices
SN  - 201444941
CY  - New Jersey
KW  - MEMS -- Microelectronic mechanical systems
KW  - Microelectronics -- MOS and CMOS (Metal oxide semiconductor, Complimentary) -- Fabrication
N1  - Includes bibliographical references and index
ER  -