Ghandhi, Sorab, K <br/><br/>
VLSI fabrication principles : silicon and gallium arsenide 

 - 2 
 - Singapore  John Wiley  1994 
 - xxiv, 834p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>471580058 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits-Very large scale integration(VLSI) -- Silicon --Galluim arsenide