Hsu, Tai-Ran <br/><br/>
MEMS and microsystems : design and manufacture 

 - New Delhi  Tata McGraw-Hill  2002 
 - xii, 436p:  
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>0-07-048709-x 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microelectronics<br/>Microsystems