TY  - BOOK
AU  - Hsu, Tai-Ran
TI  - MEMS and microsystems : design and manufacture
SN  - 0-07-048709-x
CY  - New Delhi
KW  - Microelectromechanical systems
KW  - Microelectronics
KW  - Microsystems
N1  - Includes index
ER  -