TY  - BOOK
AU  - Van Zant, Peter
TI  - Microchip fabrication : a practical guide to semiconductor processing
SN  - 007118421x
CY  - Singapore
KW  - Crystalline materials
KW  - Integrated circuit formation
KW  - Photolithography process --Patterning
KW  - Semiconductors -- Materials and Process chemicals
KW  - Wafers -- Manufacturing and Fabrication
N1  - Includes bibliographical references and index
ER  -