Van Zant, Peter <br/><br/>
Microchip fabrication: a practical guide to semiconductor processing 

 - 4 
 - Singapore  McGraw-Hill  2000 
 - xvi, 632p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>007118421x 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Crystalline materials<br/>Integrated circuit formation<br/>Photolithography process --Patterning<br/>Semiconductors -- Materials and Process chemicals<br/>Wafers -- Manufacturing and Fabrication