National Research Council-Division on Engineering and Physical Sciences-Commission on Physical Sciences, Mathematics, and Applications-Panel on Database Needs in Plasma Processing <br/><br/>
Database Needs for Modeling and Simulation of Plasma Processing 

 -  National Academies Press  1996 
 - The Compass Series .
<br/><br/><label>ISBN: </label>9780309055918 
<br/><br/><label>Subjects--Topical Terms: </label><br/> General<br/>Plasma engineering--Computer simulation--Congresses.,Plasma engineering--Databases--Congresses.,Semiconductors--Design and construction--Congresses.<br/>SCIENCE