May, Gary S <br/><br/>
Fundamentals of semiconductor fabrication 

 - Singapore  John Wiley  2004 
 - xiii, 305p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>981253072X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor fabrication