TY  - DATA
AU  - Kaiying Wang
TI  - Photoresist Technology in Microsystems: Principles, Processes and Applications
T2  - Springer Series in Advanced Microelectronics
SN  - 9789819516063
PB  - Springer Nature Singapore
KW  - Engineering
UR  - https://link.springer.com/openurl?genre=book&isbn=978-981-95-1606-3
ER  -