TY  - DATA
AU  - Duc-Nam Nguyen
AU  - Ngoc Dang Khoa Tran
AU  - Takahito Ono
TI  - Microactuators, Microsensors and Micromechanisms
T2  - Mechanisms and Machine Science
SN  - 9783031833571
PB  - Springer Nature Switzerland
KW  - Intelligent Technologies and Robotics
UR  - https://link.springer.com/openurl?genre=book&isbn=978-3-031-83357-1
ER  -