Lyshevski, Sergey Edward <br/><br/>
MEMS and NEMS : systems, devices and structures 

 - New York  CRC Press  2002 
 - 461p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>849312620 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Computer-Aided design -- MEMS and NEMS<br/>MEMS)<br/>Microelectromechanical systems (<br/>Nano electromechanical systems(<br/>NEMS)