TY  - BOOK
AU  - Lyshevski, Sergey Edward
TI  - MEMS and NEMS : systems, devices and structures
SN  - 849312620
CY  - New York
KW  - Computer-Aided design -- MEMS and NEMS
KW  - MEMS)
KW  - Microelectromechanical systems (
KW  - Nano electromechanical systems(
KW  - NEMS)
N1  - Includes bibliographical references and index
ER  -