TY - DATA AU - Kamaljeet Singh AU - Ayan Karmakar TI - Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications SN - 9789819661626 PB - Springer Nature Singapore KW - Mechanical Engineering UR - https://link.springer.com/openurl?genre=book&isbn=978-981-96-6162-6 ER -