TY  - BOOK
AU  - Allen, James, J
TI  - Micro electro mechanical system design
SN  - 0-8247-5824-2
CY  - New York
KW  - Chemical mechanical polishing
KW  - Electromechanics
KW  - Engineering design
KW  - Mechanics -- Micrelectro mechanics
KW  - MEMS) -- Tools and Technics
KW  - Metal polishing -- Chemical mechanical polishing
KW  - Microelectromechanical systems (
N1  - Includes bibliographical references and index
ER  -