Geng, Hwaiyu, Ed. <br/><br/>
Semiconductor manufacturing handbook 

 - New York  McGraw-Hill  2005 
 - ill.  
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>0-07-144559-5 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical Systems (MEMS)<br/>Nanotechnology<br/>Semiconductor manufacturing -- Handbook