TY  - BOOK
AU  - Geng, Hwaiyu, Ed.
TI  - Semiconductor manufacturing handbook
SN  - 0-07-144559-5
CY  - New York
KW  - Microelectromechanical Systems (MEMS)
KW  - Nanotechnology
KW  - Semiconductor manufacturing -- Handbook
N1  - Includes index
ER  -