TY  - BOOK
AU  - Helbert, John N, Ed.
TI  - Handbook of VLSI microlithography
SN  - 81-7992-475-0
CY  - Mumbai
KW  - Integrated circuits -- Very large scale integration
KW  - Microlithography
KW  - VLSI microlithography -- Handbook
N1  - Includes bibliographical references and index
ER  -