O'Mara, William C, Ed. <br/><br/>
Handbook of semiconductor silicon technology 

 - New Delhi  Crest  2005 
 - xx, 795p.  
<br/><br/> Includes index. 
<br/><br/><label>ISBN: </label>81-242-0508-6 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductor silicon technology -- Handbook