TY  - BOOK
AU  - Ohring, Milton
TI  - Materials science of thin films : deposition and structure
SN  - 81-312-0279-8
CY  - New Delhi
KW  - Epitaxy
KW  - Film structure
KW  - Materials science -- Thin films
KW  - Physics
KW  - Thin film nucleation
KW  - Thin films -- Deposition and structure
KW  - Thin films -- Mechanical properties
KW  - Vacuum science
N1  - Reprint year 2006. Includes bibliographical references and index
ER  -