Franssila, Sami <br/><br/>
Introduction to microfabrication 

 - New York  John Wiley  2004 
 - xvii, 401p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0-470-85106-6 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Electronic apparatus and Appliances<br/>Electronic materials -- <br/>Etching -- Electrochemical etching<br/>MEMS)<br/>Metrology -- Micrometrology<br/>Microelectromechanical systems (<br/>Microfabrication<br/>Silicon meterials<br/>Thinfilm materials