Ghandhi, Sorab K <br/><br/>
VLSI fabrication principles : silicon and gallium arsenide 

 - 2 
 - Singapore  John Wiley  1994 
 - xxiv, 834p.  
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9814126942 
<br/><br/><label>Subjects--Topical Terms: </label><br/>(VLSI)<br/>Doping<br/>Gallium arsenide crystal growth<br/>Integrated circuits -- <br/>Ion implantation<br/>Silicon<br/>Very large scale integration