Singh, R K <br/><br/>
VLSI : technology, design and basics of microelectronics 

 - New Delhi  S. K. Kataria and Sons  2004 
 - xv, 419p.  
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>8188458171 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Bipolar IC Technology<br/>Film deposition<br/>Integrated circuits -- VLSI<br/>Lithography<br/>MOSFET and MOS Fabrication technology<br/>Photoresist and etching<br/>Very large scale integration(VLSI) -- Design<br/>VLSI Technology