TY  - BOOK
AU  - Singh, R K
TI  - VLSI : technology, design and basics of microelectronics
SN  - 8188458171
CY  - New Delhi
KW  - Bipolar IC Technology
KW  - Film deposition
KW  - Integrated circuits -- VLSI
KW  - Lithography
KW  - MOSFET and MOS Fabrication technology
KW  - Photoresist and etching
KW  - Very large scale integration(VLSI) -- Design
KW  - VLSI Technology
N1  - Includes index
ER  -