Lyshevski, Sergey Edward <br/><br/>
Nano - and Micro - electromechanical systems : fundamentals of nano and microengineering 

 - 2 
 - New York  CRC Press  2005 
 - 722p. : ill.  
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>849328381 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanoelectromechanical systems<br/>Nanotechnology