TY  - BOOK
AU  - Lyshevski, Sergey Edward
TI  - Nano - and Micro - electromechanical systems : fundamentals of nano and microengineering
SN  - 849328381
CY  - New York
KW  - Nanoelectromechanical systems
KW  - Nanotechnology
N1  - Includes bibliographical references and index
ER  -