McGuire, Gary E, Ed. <br/><br/>
Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) 

 - Mumbai  Jaico  2007 
 - xiii, 675p. ;  
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>8179925374 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Process technology -- Handbook<br/>Semiconductor materials -- Handbook<br/>Ultra large scale integration (ULSI)<br/>Very large scale integration(VLSI)