Sze, S M Ed.

VLSI Technology - 2 - New Delhi Tata McGraw Hill 1988 - xii, 676p.;

Includes index. Replaced on 4/5/12

70582912


Dielectric and polysilicon film deposition
Integrated circuits -- VLSI
Lithography -- X-Ray lithography
Very large scale integration(VLSI)
VLSI Technology