TY  - BOOK
AU  - Sze, S M Ed.
TI  - VLSI Technology
SN  - 70582912
CY  - New Delhi
KW  - Dielectric and polysilicon film deposition
KW  - Integrated circuits -- VLSI
KW  - Lithography -- X-Ray lithography
KW  - Very large scale integration(VLSI)
KW  - VLSI Technology
N1  - Includes index. Replaced on 4/5/12
ER  -