Sze, S M, Ed. <br/><br/>
VLSI Technology 

 - 2 
 - New York  McGraw-Hill  1988 
 - xii, 676p:  
<br/><br/> Includes index 
<br/><br/><label>ISBN: </label>71003479 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Dielectric and polysilicon film deposition<br/>Integrated circuits -- VLSI<br/>Lithography -- X-Ray lithography<br/>Very large scale integration(VLSI)<br/>VLSI Technology