TY  - BOOK
AU  - Lobontiu, Nicolae
AU  - Garcia, Ephrahim
TI  - Mechanics of microelectromechanical systems
SN  - 978818128849
CY  - New York
KW  - Electromagnetic transduction
KW  - MEMS)  Design
KW  - Microbridges  Mems applications
KW  - Microcantilevers
KW  - Microelectromechanical systems (
KW  - Microtransduction -- Actuation and Sensing
N1  - Includes index
ER  -