De Los Santos, Hector J <br/><br/>
Principles and applications of nanoMEMS physics 

 - New Delhi  Springer  2005 
 - xv, 254p.   
<br/><br/> Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>978818128530 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems (MEMS)<br/>Nano technology<br/>Nanoelectromechanical quantum circuits<br/>Nanoelectromechanical systems  Applications<br/>Nanoelectromechanical systems (NEMS)<br/>Nanomems<br/>Nanomems  Photonics<br/>Quantum wave particle phenomena<br/>Superconductivity  Nanomems