TY  - BOOK
AU  - De Los Santos, Hector J
TI  - Principles and applications of nanoMEMS physics
SN  - 978818128530
CY  - New Delhi
KW  - Microelectromechanical systems (MEMS)
KW  - Nano technology
KW  - Nanoelectromechanical quantum circuits
KW  - Nanoelectromechanical systems  Applications
KW  - Nanoelectromechanical systems (NEMS)
KW  - Nanomems
KW  - Nanomems  Photonics
KW  - Quantum wave particle phenomena
KW  - Superconductivity  Nanomems
N1  - Includes bibliographical references and index
ER  -